Precision Positioning of a Surface Motor-driven Multi-axis Stage Using a Surface Encoder. (2nd report). Experiment of Dynamic Micro-positioning.
نویسندگان
چکیده
منابع مشابه
A High-Precision, Magnetically Levitated Positioning Stage
High accuracy positioning stages with multiple degrees-of-freedom, or microsteppers, are ubiquitous in industrial manufacturing. These devices are used in probing and inspection systems, in the assembly of disk drive heads, and in semiconductor manufacturing. In semiconductor manufacturing, microsteppers are employed to accurately move silicon wafers in the photolithography process. To guarante...
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Preface This thesis describes the work I have done at Mapper Lithography B.V. in Delft, as a final project for my masters Precision and Microsystems Engineering at Delft University of Technology, faculty 3mE. This project is part of the process of designing a high-precision linear positioning stage for a wafer scanner using electron beam lithography. The first part of my work is focused on the ...
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With the advent of multi-channel EEG hardware systems and the concurrent development of topographic and tomographic signal source localization methods, the international 10/20 system, a standard system for electrode positioning with 21 electrodes, was extended to higher density electrode settings such as 10/10 and 10/5 systems, allowing more than 300 electrode positions. However, their effectiv...
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In this paper, a Lorentz force-based XY positioning stage with a stack of four electromagnetic linear motors in parallel configuration is presented. The overall design of the positioning stage consists of a mobile and a fixed part separated using a fourpoint contact technique. The uniqueness of the proposed positioning stage lies in its light design with the ability to perform variable strokes ...
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ژورنال
عنوان ژورنال: Journal of the Japan Society for Precision Engineering
سال: 2003
ISSN: 1882-675X,0912-0289
DOI: 10.2493/jjspe.69.433